Myakon'kikh Andrei Valer'evich

Publications in Math-Net.Ru

1. Low-pressure inductively coupled CF$_{3}$Br plasma studied by the Langmuir probe and optical emission spectroscopy techniques
   
   Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:2 (2021),  52–54
2. Influence of the finite-size effect on the cluster ion emission of silicon nanostructures
   
   Pis'ma v Zh. Èksper. Teoret. Fiz., 111:8 (2020),  531–535
3. Analytical model of atomic layer deposition of films on 3D structures with high aspect ratios
   
   Zhurnal Tekhnicheskoi Fiziki, 88:2 (2018),  243–250
4. Dose dependence of nanocrystal formation in helium-implanted silicon layers
   
   Pisma v Zhurnal Tekhnicheskoi Fiziki, 44:7 (2018),  39–46
5. Biosensor properties of SOI nanowire transistors with a PEALD Al$_{2}$O$_{3}$ dielectric protective layer
   
   Fizika i Tekhnika Poluprovodnikov, 50:5 (2016),  643–649