Publications in Math-Net.Ru
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Высокотемпературная ионная имплантация мышьяка в кремний
Fizika i Tekhnika Poluprovodnikov, 24:6 (1990), 1132–1133
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SYNTHESIS OF SI3N4 AMORPHOUS FILMS DURING NITROGEN ION-IMPLANTATION TO
SILICON
Pisma v Zhurnal Tekhnicheskoi Fiziki, 16:23 (1990), 43–45
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Исследование распределения аморфной и кристаллической фазы
ионно-синтезированного SiC в Si
Fizika i Tekhnika Poluprovodnikov, 22:4 (1988), 731–732
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Study of the Formation of $\beta$-SiC Monocrystalline Layers on Si by the Method of Highly Intense Ionic Doping
Fizika i Tekhnika Poluprovodnikov, 21:5 (1987), 920–922
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Synthesis of Monocrystalline Silicon Carbide by Single-Step Equipment of Highly Intense Ion Doping
Fizika i Tekhnika Poluprovodnikov, 20:1 (1986), 149–152
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