Publications in Math-Net.Ru
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Phenomenological model of metal coating etching in a gas mixtured plasma
PFMT, 2023, no. 4(57), 69–73
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Structure and mechanical properties of carbon coatings doped with zirconium and silicon
PFMT, 2023, no. 4(57), 42–47
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Modeling of ir radiation influence on the phase composition of silicon dioxide coatings
PFMT, 2023, no. 3(56), 64–68
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Modeling of plasma-chemical etching of silicon nitride functional layer on silicon dioxide sublayer in microelectronics technologies
PFMT, 2023, no. 3(56), 60–63
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Structure and mechanical properties of silicon-carbon coatings alloyed with chromium
PFMT, 2022, no. 2(51), 52–57
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Influence of ion-plasma nitrogen on the structure of composite coatings based on cellulose and carbon nanotubes
PFMT, 2020, no. 4(45), 62–67
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