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Kupo Aleksandr Nikolaevich

Publications in Math-Net.Ru

  1. Phenomenological model of metal coating etching in a gas mixtured plasma

    PFMT, 2023, no. 4(57),  69–73
  2. Structure and mechanical properties of carbon coatings doped with zirconium and silicon

    PFMT, 2023, no. 4(57),  42–47
  3. Modeling of ir radiation influence on the phase composition of silicon dioxide coatings

    PFMT, 2023, no. 3(56),  64–68
  4. Modeling of plasma-chemical etching of silicon nitride functional layer on silicon dioxide sublayer in microelectronics technologies

    PFMT, 2023, no. 3(56),  60–63
  5. Structure and mechanical properties of silicon-carbon coatings alloyed with chromium

    PFMT, 2022, no. 2(51),  52–57
  6. Influence of ion-plasma nitrogen on the structure of composite coatings based on cellulose and carbon nanotubes

    PFMT, 2020, no. 4(45),  62–67


© Steklov Math. Inst. of RAS, 2024