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Litvinenko S A
Publications in Math-Net.Ru
Oxidation temperature effect on mechanical stresses in
$\mathrm{SiO}_{2}$
films on
$\mathrm{Si}$
Fizika Tverdogo Tela
,
27
:11 (1985),
3504–3506
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Steklov Math. Inst. of RAS
, 2024