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Publications in Math-Net.Ru
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Effect of the chloropentafluoroethane additive in chlorine-containing plasma on the etching rate and etching-profile characteristics of gallium arsenide
Fizika i Tekhnika Poluprovodnikov, 55:10 (2021), 837–840
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Study of undoped nanocrystalline diamond films grown by microwave plasma-assisted chemical vapor deposition
Fizika i Tekhnika Poluprovodnikov, 55:1 (2021), 49–58
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Features of the vapor-phase epitaxy of GaAs on nonplanar substrates
Fizika i Tekhnika Poluprovodnikov, 54:9 (2020), 958–961
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Formation of ohmic contacts to a diamond-like carbon layer deposited on a dielectric diamond substrate
Fizika i Tekhnika Poluprovodnikov, 54:9 (2020), 865–867
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Modification of the ratio between $sp^2/sp^3$-hybridized carbon components in PECVD diamond-like films
Fizika i Tekhnika Poluprovodnikov, 54:9 (2020), 855–858
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The use of pulsed laser annealing to form ohmic Mo/Ti contacts to diamond
Pisma v Zhurnal Tekhnicheskoi Fiziki, 46:11 (2020), 34–38
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Formation of low-resistivity Au/Mo/Ti ohmic contacts to $p$-diamond epitaxial layers
Zhurnal Tekhnicheskoi Fiziki, 89:12 (2019), 1923–1932
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Ohmic contacts to CVD diamond with boron-doped $\delta$ layers
Fizika i Tekhnika Poluprovodnikov, 53:10 (2019), 1386–1390
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Vertical field-effect transistor with control $p$–$n$-junction based on GaAs
Fizika i Tekhnika Poluprovodnikov, 53:10 (2019), 1311–1314
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Plasma-chemical deposition of diamond-like films onto the surface of heavily doped single-crystal diamond
Fizika i Tekhnika Poluprovodnikov, 53:9 (2019), 1229–1232
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A new approach to tof-sims analysis of the phase composition of carbon-containing materials
Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:2 (2019), 50–54
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Plasma chemical etching of gallium arsenide in C$_{2}$F$_{5}$Cl-based inductively coupled plasma
Fizika i Tekhnika Poluprovodnikov, 52:11 (2018), 1362–1365
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Low-temperature deposition of SiN$_ x$ films in SiH$_{4}$/Ar + N$_{2}$ inductively coupled plasma under high silane dilution with argon
Fizika i Tekhnika Poluprovodnikov, 51:11 (2017), 1503–1506
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Heavily doped GaAs:Te layers grown by MOVPE using diisopropyl telluride as a source
Fizika i Tekhnika Poluprovodnikov, 50:11 (2016), 1459–1462
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