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Mesh Maxim Vladimirovich
Publications in Math-Net.Ru
Application of atomic layer deposition for obtaining nanostructured ITO/Al
$_{2}$
O
$_{3}$
coatings
Fizika i Tekhnika Poluprovodnikov
,
55
:4 (2021),
365–372
©
Steklov Math. Inst. of RAS
, 2024
