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Arkhipova Ekaterina Alexandrovna

Publications in Math-Net.Ru

  1. Investigation of boron-doped delta layers in CVD diamond grown on single-sector HPHT substrates

    Nanosystems: Physics, Chemistry, Mathematics, 13:5 (2022),  578–584
  2. Effect of the chloropentafluoroethane additive in chlorine-containing plasma on the etching rate and etching-profile characteristics of gallium arsenide

    Fizika i Tekhnika Poluprovodnikov, 55:10 (2021),  837–840
  3. Formation of ohmic contacts to a diamond-like carbon layer deposited on a dielectric diamond substrate

    Fizika i Tekhnika Poluprovodnikov, 54:9 (2020),  865–867
  4. Modification of the ratio between $sp^2/sp^3$-hybridized carbon components in PECVD diamond-like films

    Fizika i Tekhnika Poluprovodnikov, 54:9 (2020),  855–858
  5. The use of pulsed laser annealing to form ohmic Mo/Ti contacts to diamond

    Pisma v Zhurnal Tekhnicheskoi Fiziki, 46:11 (2020),  34–38
  6. Formation of low-resistivity Au/Mo/Ti ohmic contacts to $p$-diamond epitaxial layers

    Zhurnal Tekhnicheskoi Fiziki, 89:12 (2019),  1923–1932
  7. Ohmic contacts to CVD diamond with boron-doped $\delta$ layers

    Fizika i Tekhnika Poluprovodnikov, 53:10 (2019),  1386–1390
  8. Plasma-chemical deposition of diamond-like films onto the surface of heavily doped single-crystal diamond

    Fizika i Tekhnika Poluprovodnikov, 53:9 (2019),  1229–1232


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