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Publications in Math-Net.Ru
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Investigation of boron-doped delta layers in CVD diamond grown on single-sector HPHT substrates
Nanosystems: Physics, Chemistry, Mathematics, 13:5 (2022), 578–584
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Effect of the chloropentafluoroethane additive in chlorine-containing plasma on the etching rate and etching-profile characteristics of gallium arsenide
Fizika i Tekhnika Poluprovodnikov, 55:10 (2021), 837–840
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Formation of ohmic contacts to a diamond-like carbon layer deposited on a dielectric diamond substrate
Fizika i Tekhnika Poluprovodnikov, 54:9 (2020), 865–867
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Modification of the ratio between $sp^2/sp^3$-hybridized carbon components in PECVD diamond-like films
Fizika i Tekhnika Poluprovodnikov, 54:9 (2020), 855–858
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The use of pulsed laser annealing to form ohmic Mo/Ti contacts to diamond
Pisma v Zhurnal Tekhnicheskoi Fiziki, 46:11 (2020), 34–38
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Formation of low-resistivity Au/Mo/Ti ohmic contacts to $p$-diamond epitaxial layers
Zhurnal Tekhnicheskoi Fiziki, 89:12 (2019), 1923–1932
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Ohmic contacts to CVD diamond with boron-doped $\delta$ layers
Fizika i Tekhnika Poluprovodnikov, 53:10 (2019), 1386–1390
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Plasma-chemical deposition of diamond-like films onto the surface of heavily doped single-crystal diamond
Fizika i Tekhnika Poluprovodnikov, 53:9 (2019), 1229–1232
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