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Filippov N A
Publications in Math-Net.Ru
Study of the dynamics of heating anode units in a maskless nanolithograph based on an array of microfocus X-ray tubes
Zhurnal Tekhnicheskoi Fiziki
,
91
:10 (2021),
1566–1576
Development of technological principles for creating a system of microfocus X-ray tubes based on silicon field emission nanocathodes
Zhurnal Tekhnicheskoi Fiziki
,
89
:12 (2019),
1836–1842
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Steklov Math. Inst. of RAS
, 2024