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Oreshkin G I
Publications in Math-Net.Ru
Optimization of an anode membrane with a transmission-type target in a system of soft X-ray sources for X-ray nanolithography
Zhurnal Tekhnicheskoi Fiziki
,
90
:11 (2020),
1789–1796
©
Steklov Math. Inst. of RAS
, 2024
