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Tuzhilkin Mikhail Sergeevich
Publications in Math-Net.Ru
Formation of Au nanoparticles and features of etching of a Si substrate under irradiation with atomic and molecular ions
Fizika i Tekhnika Poluprovodnikov
,
54
:1 (2020),
90–96
©
Steklov Math. Inst. of RAS
, 2024