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Tomosh Konstantin Nikolaevich

Publications in Math-Net.Ru

  1. Low-energy defectless dry etching of the AlGaN/AlN/GaN HEMT barrier layer

    Pisma v Zhurnal Tekhnicheskoi Fiziki, 44:10 (2018),  61–67
  2. Investigation of the fabrication processes of AlGaN/AlN/GaN ÍÅÌÒs with in situ Si$_{3}$N$_{4}$ passivation

    Fizika i Tekhnika Poluprovodnikov, 50:10 (2016),  1434–1438
  3. Fabrication of a terahertz quantum-cascade laser with a double metal waveguide based on multilayer GaAs/AlGaAs heterostructures

    Fizika i Tekhnika Poluprovodnikov, 50:10 (2016),  1395–1400
  4. On a two-layer Si$_{3}$N$_{4}$/SiO$_{2}$ dielectric mask for low-resistance ohmic contacts to AlGaN/GaN HEMTs

    Fizika i Tekhnika Poluprovodnikov, 50:8 (2016),  1138–1142


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