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Tomosh Konstantin Nikolaevich
Publications in Math-Net.Ru
Low-energy defectless dry etching of the AlGaN/AlN/GaN HEMT barrier layer
Pisma v Zhurnal Tekhnicheskoi Fiziki
,
44
:10 (2018),
61–67
Investigation of the fabrication processes of AlGaN/AlN/GaN ÍÅÌÒs with in situ Si
$_{3}$
N
$_{4}$
passivation
Fizika i Tekhnika Poluprovodnikov
,
50
:10 (2016),
1434–1438
Fabrication of a terahertz quantum-cascade laser with a double metal waveguide based on multilayer GaAs/AlGaAs heterostructures
Fizika i Tekhnika Poluprovodnikov
,
50
:10 (2016),
1395–1400
On a two-layer Si
$_{3}$
N
$_{4}$
/SiO
$_{2}$
dielectric mask for low-resistance ohmic contacts to AlGaN/GaN HEMTs
Fizika i Tekhnika Poluprovodnikov
,
50
:8 (2016),
1138–1142
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Steklov Math. Inst. of RAS
, 2024