Shapovalova Aleksandra Aleksandrovna

Publications in Math-Net.Ru

1. Influence of current density on the structure of thin films of amorphous silicon suboxide during electron beam annealing
   
   Prikl. Mekh. Tekh. Fiz., 64:5 (2023),  52–58
2. High-temperature annealing of thin silicon suboxide films produced by the method of gas-jet chemical deposition with activation by electron-beam plasma
   
   Prikl. Mekh. Tekh. Fiz., 63:5 (2022),  33–41