Fadeev Aleksei Vladimirovich

Publications in Math-Net.Ru

1. Model for thermal oxidation of silicon
   
   Zhurnal Tekhnicheskoi Fiziki, 89:4 (2019),  620–626
2. Atomic layer deposition of thin films onto 3$D$ nanostructures: the effect of wall tilt angle and aspect ratio of trenches
   
   Zhurnal Tekhnicheskoi Fiziki, 88:10 (2018),  1573–1580
3. Analytical model for atomic-layer deposition of thin films on the walls of cylindrical holes with a relatively high aspect ratio
   
   Zhurnal Tekhnicheskoi Fiziki, 88:8 (2018),  1264–1272