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Kozhemiako Anastasiya Vladimirovna

Publications in Math-Net.Ru

  1. Influence of the charge state of xenon ions on the depth distribution profile upon implantation into silicon

    Fizika i Tekhnika Poluprovodnikov, 53:8 (2019),  1030–1036
  2. Features of defect formation in the nanostructured silicon under ion irradiation

    Fizika i Tekhnika Poluprovodnikov, 53:6 (2019),  810–815
  3. In situ modification and analysis of the composition and crystal structure of a silicon target by ion-beam methods

    Zhurnal Tekhnicheskoi Fiziki, 88:12 (2018),  1900–1907
  4. Study of the distribution profile of iron ions implanted into silicon

    Fizika i Tekhnika Poluprovodnikov, 51:6 (2017),  778–782


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