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Zilova Ol'ga Sergeevna
Publications in Math-Net.Ru
Structure and properties of Zn-implanted Si near-surface layer modification depending on irradiation fluence of
$^{132}$
Xe
$^{26+}$
ions with energy of 167 MeV
Fizika i Tekhnika Poluprovodnikov
,
53
:3 (2019),
332–339
©
Steklov Math. Inst. of RAS
, 2024
