RUS
ENG
Full version
PEOPLE
Durman E A
Publications in Math-Net.Ru
Effect of ion-beam processing during RF magnetron sputtering on the properties of ZnO films
Fizika i Tekhnika Poluprovodnikov
,
53
:11 (2019),
1497–1504
©
Steklov Math. Inst. of RAS
, 2024
