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Doan H T
Publications in Math-Net.Ru
Influence of aluminum doping degree on the properties of titanium-aluminum oxide films
PFMT
, 2023, no. 2(55),
74–82
Peculiarity of reactive magnetron deposition of tantalum oxide films with different methods of gas supply into the chamber
PFMT
, 2022, no. 3(52),
97–104
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Steklov Math. Inst. of RAS
, 2024