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Zakharov Aleksandr Nikolaevich
Publications in Math-Net.Ru
Deposition of ultrahard Ti–Si–N coatings by pulsed high-current reactive magnetron sputtering
Zhurnal Tekhnicheskoi Fiziki
,
86
:2 (2016),
59–64
©
Steklov Math. Inst. of RAS
, 2024
