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Rabotkin Sergey Viktorovich
Publications in Math-Net.Ru
Deposition of silicon–carbon coatings from the plasma of a non-self-sustained arc discharge with a heated cathode
Zhurnal Tekhnicheskoi Fiziki
,
86
:5 (2016),
51–56
Deposition of ultrahard Ti–Si–N coatings by pulsed high-current reactive magnetron sputtering
Zhurnal Tekhnicheskoi Fiziki
,
86
:2 (2016),
59–64
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Steklov Math. Inst. of RAS
, 2025