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Glukhov Aleksandr Viktorovich
Publications in Math-Net.Ru
Biosensor properties of SOI nanowire transistors with a PEALD Al
$_{2}$
O
$_{3}$
dielectric protective layer
Fizika i Tekhnika Poluprovodnikov
,
50
:5 (2016),
643–649
©
Steklov Math. Inst. of RAS
, 2024
