RUS
ENG
Full version
PEOPLE
Korovin Anatoliy Gennad'evich
Publications in Math-Net.Ru
Analysis of thickness unevenness of the epitaxial silicon layer during deposition from sublimation sources in a vacuum
University proceedings. Volga region. Physical and mathematical sciences
, 2015, no. 4,
93–100
©
Steklov Math. Inst. of RAS
, 2024