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Bashkatov Dmitrii Denisovich
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Chemical kinetics of the Si(111) surface nitridation process at temperatures below the structural phase transition (7
$\times$
7)
$\to$
(1
$\times$
1)
Fizika i Tekhnika Poluprovodnikov
,
58
:7 (2024),
349–357
©
Steklov Math. Inst. of RAS
, 2025