Shevchenko A R

Publications in Math-Net.Ru

1. Effect of excess hydrogen flow in reactor on pecvd growth of carbon nanotubes
   
   Fizika Tverdogo Tela, 67:2 (2025),  350–355
2. Investigation of non-uniformity of properties of niobium nitride thin films obtained by atomic layer deposition
   
   Zhurnal Tekhnicheskoi Fiziki, 95:1 (2025),  84–89