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Bogoyavlenskaya (Bibik) Elena Aleksandrovna
Publications in Math-Net.Ru
Formation of W/HfO
$_2$
/Si gate structures using in situ magnetron sputtering and rapid thermal annealing
Zhurnal Tekhnicheskoi Fiziki
,
84
:5 (2014),
82–87
©
Steklov Math. Inst. of RAS
, 2025
