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Pankov K N
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Synchrotron study of the formation of nanoclusters in Al
$_2$
O
$_3$
/SiO
$_x$
/Al
$_2$
O
$_3$
/SiO
$_x$
/
$\dots$
/Si(100) multilayer nanostructures
Fizika i Tekhnika Poluprovodnikov
,
47
:10 (2013),
1327–1334
©
Steklov Math. Inst. of RAS
, 2025
