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Zyul’kov Ivan Yur'evich
Publications in Math-Net.Ru
Problems in measurements of parameters of elements and structures in modern micro- and nanoelectronics considering TiN/Ti diffusion barrier structures as an example
Pisma v Zhurnal Tekhnicheskoi Fiziki
,
39
:14 (2013),
34–42
©
Steklov Math. Inst. of RAS
, 2025
