Makhviladze T M

Publications in Math-Net.Ru

1. Theoretical study of polymer resist direct etching by heavy ions of average energy
   
   Matem. Mod., 3:1 (1991),  11–17
2. Theoretical study of polymer resists direct etching, accompanied by polymer matrix movement
   
   Matem. Mod., 2:3 (1990),  3–14
3. Modellinc and optimization of the optical schemes of the photolithography systems
   
   Matem. Mod., 2:1 (1990),  56–75
4. Influence of spatial coherence of laser radiation on the quality of images in a projection system with a Köhler-type fly's eye illuminator
   
   Kvantovaya Elektronika, 17:4 (1990),  512–516
5. Modelling of the surface mass ejection for irradiated polymeric resistors
   
   Matem. Mod., 1:10 (1989),  70–79
6. Numerical modelling of etching of polymers in an oxygen-containing atmosphere
   
   Matem. Mod., 1:2 (1989),  1–13
7. MECHANISM OF THE POLYMER FILM ETCHING IN THE LOW-TEMPERATURE PLASMA
   
   Zhurnal Tekhnicheskoi Fiziki, 56:7 (1986),  1329–1335
8. Direct photo etching of polymers under conditions of macromolecule chain unzipping
   
   Dokl. Akad. Nauk SSSR, 280:5 (1985),  1106–1110
9. Raman light scattering on phonon solitons in crystals
   
   Fizika Tverdogo Tela, 25:6 (1983),  1717–1719
10. Transient processes in propagation of an ultrashort pulse in a three-level medium
    
    Kvantovaya Elektronika, 4:6 (1977),  1313–1317