|
|
Publications in Math-Net.Ru
-
Quantum computers and quantum computations
UFN, 175:1 (2005), 3–39
-
Quantum computers: can they be made 'large'?
UFN, 169:6 (1999), 691–694
-
Modellinc and optimization of the optical schemes of the photolithography systems
Matem. Mod., 2:1 (1990), 56–75
-
Influence of spatial coherence of laser radiation on the quality of images in a projection system with a Köhler-type fly's eye illuminator
Kvantovaya Elektronika, 17:4 (1990), 512–516
-
Investigation of the characteristics of an excimer laser with a narrow emission line
Kvantovaya Elektronika, 17:1 (1990), 43–45
-
Synthetic data for inverse seismic problems
Dokl. Akad. Nauk SSSR, 309:2 (1989), 311–314
-
The procedure of reserved image formation under the impulse laser exhibit of positive VUV resitor of the base of polymethylmethacrylate sensitized by anthracene, and its kinetics
Matem. Mod., 1:12 (1989), 44–51
-
A method of data processing for the interferometric control of dissolution of resist film
Matem. Mod., 1:2 (1989), 160–164
-
ELECTRON-BEAM METHOD OF TRANSFER OF A PATTERN DRAWING WITH
APPROXIMATELY-0,1-MU-M ELEMENTS ON SEMICONDUCTING PLATES
Pisma v Zhurnal Tekhnicheskoi Fiziki, 15:17 (1989), 55–57
-
Application of metal resinate films in electron- and photolithography
Dokl. Akad. Nauk SSSR, 294:6 (1987), 1358–1362
-
DETERMINATION OF PROJECTED ION FLOW IN POLYMER RESISTS
Zhurnal Tekhnicheskoi Fiziki, 57:9 (1987), 1858–1860
-
PORE FORMATION IN THE POLYMETHYLMETHACRYLATE IN THE X-RAY EXPOSING
PROCESS
Zhurnal Tekhnicheskoi Fiziki, 57:7 (1987), 1445–1448
-
Ultraviolet-radiation effect on water-solubility of polymer-films
Pisma v Zhurnal Tekhnicheskoi Fiziki, 13:24 (1987), 1473–1476
-
Transport of soft-x-ray emission along the optical light-guide
Pisma v Zhurnal Tekhnicheskoi Fiziki, 13:5 (1987), 257–260
-
Coherence of XeCl laser radiation
Kvantovaya Elektronika, 14:6 (1987), 1266–1268
-
MECHANISM OF THE POLYMER FILM ETCHING IN THE LOW-TEMPERATURE PLASMA
Zhurnal Tekhnicheskoi Fiziki, 56:7 (1986), 1329–1335
-
Direct photo etching of polymers under conditions of macromolecule chain
unzipping
Dokl. Akad. Nauk SSSR, 280:5 (1985), 1106–1110
-
High-voltage electron lithography through the pattern former
Pisma v Zhurnal Tekhnicheskoi Fiziki, 11:17 (1985), 1048–1053
-
Nanosecond single-pulsive laser lithography
Pisma v Zhurnal Tekhnicheskoi Fiziki, 11:17 (1985), 1025–1030
-
Characteristics of the use of pulsed ultraviolet lasers in photolithography
Kvantovaya Elektronika, 12:12 (1985), 2498–2501
-
PHOTOETCHING OF PRELIMINARY IRRADIATED POLYMER-FILMS
Pisma v Zhurnal Tekhnicheskoi Fiziki, 10:10 (1984), 577–581
-
DOSIMETRY OF SOFT-X-RAY RADIATION AND VACUUM ULTRAVIOLET, BASED ON THE
PHOTOETCHING EFFECT
Zhurnal Tekhnicheskoi Fiziki, 53:3 (1983), 583–585
-
Использование скользящего разряда
для размерной обработки тонких
полимерных слоев ВУФ фототравлением
Pisma v Zhurnal Tekhnicheskoi Fiziki, 9:16 (1983), 990–994
-
Present-day semiconductor microelectronics and the prospects of its development
UFN, 109:4 (1973), 765–768
-
Rotational Brownian motion
UFN, 109:1 (1973), 31–64
-
Kev Minullinovich Salikhov (on his seventieth birthday)
UFN, 176:11 (2006), 1243–1244
-
Stanislav Vasil'evich Emel'yanov (A Tribute in Honor of His 75th Birthday)
Differ. Uravn., 40:5 (2004), 579–581
-
In memory of Vladimir Markovich Eleonskii
UFN, 173:4 (2003), 457–458
-
Georgii Viktorovich Skrotskii (Obituary)
UFN, 162:12 (1992), 175–178
-
Aleksandr Mikhailovich Prokhorov (On his seventieth birthday)
UFN, 149:3 (1986), 577–578
-
Semen Aleksandrovich Al'tshuler (Obituary)
UFN, 141:3 (1983), 559–560
-
Semen Aleksandrovich Al'tshuler (on his seventieth birthday)
UFN, 135:3 (1981), 525–526
© , 2024