Ilkayev D R

Publications in Math-Net.Ru

1. Modellinc and optimization of the optical schemes of the photolithography systems
   
   Matem. Mod., 2:1 (1990),  56–75
2. Influence of spatial coherence of laser radiation on the quality of images in a projection system with a Köhler-type fly's eye illuminator
   
   Kvantovaya Elektronika, 17:4 (1990),  512–516