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Bogdanov A L

Publications in Math-Net.Ru

  1. The procedure of reserved image formation under the impulse laser exhibit of positive VUV resitor of the base of polymethylmethacrylate sensitized by anthracene, and its kinetics

    Matem. Mod., 1:12 (1989),  44–51
  2. A method of data processing for the interferometric control of dissolution of resist film

    Matem. Mod., 1:2 (1989),  160–164
  3. Nanosecond single-pulsive laser lithography

    Pisma v Zhurnal Tekhnicheskoi Fiziki, 11:17 (1985),  1025–1030
  4. Characteristics of the use of pulsed ultraviolet lasers in photolithography

    Kvantovaya Elektronika, 12:12 (1985),  2498–2501


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