Velikov Leonid Vasil'evich

Publications in Math-Net.Ru

1. Influence of spatial coherence of laser radiation on the quality of images in a projection system with a Köhler-type fly's eye illuminator
   
   Kvantovaya Elektronika, 17:4 (1990),  512–516
2. Investigation of the characteristics of an excimer laser with a narrow emission line
   
   Kvantovaya Elektronika, 17:1 (1990),  43–45
3. The procedure of reserved image formation under the impulse laser exhibit of positive VUV resitor of the base of polymethylmethacrylate sensitized by anthracene, and its kinetics
   
   Matem. Mod., 1:12 (1989),  44–51
4. A method of data processing for the interferometric control of dissolution of resist film
   
   Matem. Mod., 1:2 (1989),  160–164
5. Application of metal resinate films in electron- and photolithography
   
   Dokl. Akad. Nauk SSSR, 294:6 (1987),  1358–1362
6. DETERMINATION OF PROJECTED ION FLOW IN POLYMER RESISTS
   
   Zhurnal Tekhnicheskoi Fiziki, 57:9 (1987),  1858–1860
7. PORE FORMATION IN THE POLYMETHYLMETHACRYLATE IN THE X-RAY EXPOSING PROCESS
   
   Zhurnal Tekhnicheskoi Fiziki, 57:7 (1987),  1445–1448
8. Ultraviolet-radiation effect on water-solubility of polymer-films
   
   Pisma v Zhurnal Tekhnicheskoi Fiziki, 13:24 (1987),  1473–1476
9. Transport of soft-x-ray emission along the optical light-guide
   
   Pisma v Zhurnal Tekhnicheskoi Fiziki, 13:5 (1987),  257–260
10. Coherence of XeCl laser radiation
    
    Kvantovaya Elektronika, 14:6 (1987),  1266–1268
11. Direct photo etching of polymers under conditions of macromolecule chain unzipping
    
    Dokl. Akad. Nauk SSSR, 280:5 (1985),  1106–1110
12. High-voltage electron lithography through the pattern former
    
    Pisma v Zhurnal Tekhnicheskoi Fiziki, 11:17 (1985),  1048–1053
13. Nanosecond single-pulsive laser lithography
    
    Pisma v Zhurnal Tekhnicheskoi Fiziki, 11:17 (1985),  1025–1030
14. Characteristics of the use of pulsed ultraviolet lasers in photolithography
    
    Kvantovaya Elektronika, 12:12 (1985),  2498–2501
15. PHOTOETCHING OF PRELIMINARY IRRADIATED POLYMER-FILMS
    
    Pisma v Zhurnal Tekhnicheskoi Fiziki, 10:10 (1984),  577–581
16. DOSIMETRY OF SOFT-X-RAY RADIATION AND VACUUM ULTRAVIOLET, BASED ON THE PHOTOETCHING EFFECT
    
    Zhurnal Tekhnicheskoi Fiziki, 53:3 (1983),  583–585
17. On the problem of adequate phenomenological description of magnetic dielectrics
    
    Dokl. Akad. Nauk SSSR, 219:6 (1974),  1341–1344