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Publications in Math-Net.Ru
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Influence of spatial coherence of laser radiation on the quality of images in a projection system with a Köhler-type fly's eye illuminator
Kvantovaya Elektronika, 17:4 (1990), 512–516
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Investigation of the characteristics of an excimer laser with a narrow emission line
Kvantovaya Elektronika, 17:1 (1990), 43–45
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The procedure of reserved image formation under the impulse laser exhibit of positive VUV resitor of the base of polymethylmethacrylate sensitized by anthracene, and its kinetics
Matem. Mod., 1:12 (1989), 44–51
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A method of data processing for the interferometric control of dissolution of resist film
Matem. Mod., 1:2 (1989), 160–164
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Coherence of XeCl laser radiation
Kvantovaya Elektronika, 14:6 (1987), 1266–1268
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Nanosecond single-pulsive laser lithography
Pisma v Zhurnal Tekhnicheskoi Fiziki, 11:17 (1985), 1025–1030
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Characteristics of the use of pulsed ultraviolet lasers in photolithography
Kvantovaya Elektronika, 12:12 (1985), 2498–2501
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Nonself-sustained discharge in a CO2 laser with a plasma cathode
Kvantovaya Elektronika, 10:7 (1983), 1517–1519
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Calculation of cascade lasing due to 0001–0200–0110 transitions in CO2 molecules pumped by a pulsed gas discharge
Kvantovaya Elektronika, 9:8 (1982), 1721–1724
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Initiation of a high-power nonself-sustained volume discharge in molecular gases by ultraviolet radiation from a plasma cathode
Kvantovaya Elektronika, 9:8 (1982), 1718–1721
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Use of a surface discharge for preionization of gases in discharge lasers
Kvantovaya Elektronika, 5:8 (1978), 1843–1847
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Spectral characteristics of vacuum ultraviolet preionization sources for CO2 lasers
Kvantovaya Elektronika, 5:6 (1978), 1221–1229
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Plasma-sheet CO2 laser
Kvantovaya Elektronika, 3:8 (1976), 1721–1726
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Space-time characteristics of pulses emitted from a double-discharge CO2 laser
Kvantovaya Elektronika, 1:6 (1974), 1416–1419
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Shape and energy of pulses emitted by a carbon dioxide laser with a helical distribution of electrodes
Kvantovaya Elektronika, 1973, no. 3(15), 116–119
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