Publications in Math-Net.Ru
-
Formation of titanium nitride films by reactive magnetron sputtering under low pressure
PFMT, 2016, no. 2(27), 12–17
-
Simulation of physical processes in the surface layer, the formation of micro and nanostructures by electrodynamic influences
PFMT, 2011, no. 2(7), 31–37
-
Prediction of targets erosion in magnetron sputtering systems
PFMT, 2010, no. 2(3), 62–67
© , 2024