Chernysh Vladimir Savel'evich

Publications in Math-Net.Ru

1. Gas-dynamic sources of cluster ions for basic and applied research
   
   UFN, 192:7 (2022),  722–753
2. Influence of the charge state of xenon ions on the depth distribution profile upon implantation into silicon
   
   Fizika i Tekhnika Poluprovodnikov, 53:8 (2019),  1030–1036
3. In situ modification and analysis of the composition and crystal structure of a silicon target by ion-beam methods
   
   Zhurnal Tekhnicheskoi Fiziki, 88:12 (2018),  1900–1907
4. Study of the distribution profile of iron ions implanted into silicon
   
   Fizika i Tekhnika Poluprovodnikov, 51:6 (2017),  778–782
5. Polishing superhard material surfaces with gas-cluster ion beams
   
   Pisma v Zhurnal Tekhnicheskoi Fiziki, 43:2 (2017),  18–23
6. Implantation of high-energy ions produced by femtosecond laser pulses
   
   Kvantovaya Elektronika, 35:1 (2005),  33–37