Murin Dmitriy Borisovich

Publications in Math-Net.Ru

1. The importance of taking into account the heterogeneous recombination of atoms when studying the kinetics of copper etching in chlorine plasma
   
   TVT, 59:5 (2021),  650–656
2. Study of the surface of GaAs after etching in high-frequency and glow discharge plasma by atomic force microscopy
   
   Fizika i Tekhnika Poluprovodnikov, 50:2 (2016),  167–170
3. Effect of Mixture Composition on the Electrophysical Parameters and Emission Spectra of $\mathrm{HCl}$–$\mathrm{O}_2$ and $\mathrm{HCl}$–$\mathrm{Ar}$ Plasma
   
   TVT, 49:4 (2011),  509–512