Voronina Ekaterina Nikolaevna

Publications in Math-Net.Ru

1. Mechanisms of fluorocarbon film destruction during atomic layer etching of silicon dioxide
   
   Pisma v Zhurnal Tekhnicheskoi Fiziki, 52:13 (2026),  38–42
2. N$_2$ plasma interaction with molybdenum disulfide monolayers
   
   Pisma v Zhurnal Tekhnicheskoi Fiziki, 49:18 (2023),  8–11
3. Study of H, N, and O atom interaction with quasi-two-dimensional molybdenum disulfide
   
   Pisma v Zhurnal Tekhnicheskoi Fiziki, 48:22 (2022),  28–32
4. Functionalization of low-k surfaces with low-energy Ar ions
   
   Pisma v Zhurnal Tekhnicheskoi Fiziki, 48:7 (2022),  16–19
5. Features of low-energy He and Ar ion irradiation of nanoporous Si/SiO$_{2}$-based materials
   
   Pisma v Zhurnal Tekhnicheskoi Fiziki, 46:11 (2020),  15–18