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ЖУРНАЛЫ // Mendeleev Communications // Архив

Mendeleev Commun., 2012, том 22, выпуск 5, страницы 239–241 (Mi mendc2804)

Эта публикация цитируется в 7 статьях

Tin(ii) Hexafluoroacetylacetonate as a Precursor in Atmospheric Pressure Chemical Vapour Deposition: Synthesis, Structure and Properties

V. G. Sevastyanov, E. P. Simonenko, P. A. Ignatov, V. S. Popov, A. V. Churakov, N. T. Kuznetsov, V. S. Sergienko

N.S. Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences, Moscow, Russian Federation

Аннотация: A new method for the synthesis of volatile tin(ii) hexafluoroacetylacetonate [Sn(C5HO2F6)2] was suggested, the compound was characterized by elemental analysis, IR spectroscopy, and DTA/TGA; the crystal structure was established by X-ray diffraction; the morphology and composition of the coating deposited by atmospheric pressure chemical vapour deposition were studied by SEM-EDX and XRD.

Ключевые слова: CVD, tin oxide, films, precursor, tin hexafluoroacetylacetonate.

Язык публикации: английский

DOI: 10.1016/j.mencom.2012.09.003



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