Inertial nanostep piezoelectric drive: modeling and experiment

A vertical inertial nanostep piezoelectric drive is considered. A virtual model was created, and the operating modes of a real drive were studied by numerical experiment. Piezo electromechanical resonance was discovered and a method to eliminate resonant vibrations by increasing electrical losses in the discharge circuit of the piezo actuator capacitance was proposed. A satisfactory agreement between the calculated and experimental data for the drive steps in the nanometer displacement range was obtained.