Аннотация:
Indium–gallium–zinc oxide InGaZn$_2$O$_5$ was synthesized by nitrate-glycolate gel decomposition method using ethylene glycol as a complexing and chelating agent. In this work, SEM, EDS and UV-visdiffusion spectra of IGZO were obtained. InGaZn$_2$O$_5$ optical band gap was found using Kubelka–Munk transformation. The morphology of the particles was examined: at low sintering temperatures many micro-meter particles are observed, the sample is heterogeneous in crystalline state. At annealing temperatures above 800$^\circ$C a single-phase crystalline structure is observed.