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ЖУРНАЛЫ // Наносистемы: физика, химия, математика // Архив

Наносистемы: физика, химия, математика, 2024, том 15, выпуск 6, страницы 806–813 (Mi nano1326)

CHEMISTRY AND MATERIAL SCIENCE

Synthesis and research of physical and chemical properties of InGaZn$_2$O$_5$ prepared by nitrate-glycolate gel decomposition method

Egor S. Anannikova, Timofey A. Markina, Ibrohimi A. Solizodaabc, Gleb M. Zirnika, Daniil A. Uchaevd, Alexander S. Chernukhaabd, Svetlana A. Gudkovaab, Denis A. Vinnikabd

a Moscow Institute of Physics and Technology, Dolgoprudny, Russia
b St. Petersburg State University, St. Petersburg, Russia
c Tajik National University, Dushanbe, Tajikistan
d South Ural State University, Chelyabinsk, Russia

Аннотация: Indium–gallium–zinc oxide InGaZn$_2$O$_5$ was synthesized by nitrate-glycolate gel decomposition method using ethylene glycol as a complexing and chelating agent. In this work, SEM, EDS and UV-visdiffusion spectra of IGZO were obtained. InGaZn$_2$O$_5$ optical band gap was found using Kubelka–Munk transformation. The morphology of the particles was examined: at low sintering temperatures many micro-meter particles are observed, the sample is heterogeneous in crystalline state. At annealing temperatures above 800$^\circ$C a single-phase crystalline structure is observed.

Ключевые слова: indium-gallium-zinc oxide, IGZO, InGaZn$_2$O$_5$, nitrate-glycolate gel, chelating reagent, ethylene glycol, chelate-nitrate method.

Поступила в редакцию: 09.10.2024
Исправленный вариант: 12.11.2024
Принята в печать: 13.11.2024

Язык публикации: английский

DOI: 10.17586/2220-8054-2024-15-6-806-813



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