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ЖУРНАЛЫ // Наносистемы: физика, химия, математика // Архив

Наносистемы: физика, химия, математика, 2014, том 5, выпуск 1, страницы 117–122 (Mi nano840)

Investigation of structure and transport properties of graphene grown by low-pressure no flow CVD on polycrystalline Ni films

O. V. Kononenkoa, V. N. Matveeva, D. P. Fieldb, D. V. Matveevc, S. I. Bozhkoc, D. V. Roshchupkina, E. E. Vdovina, A. N. Baranovd

a Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Chernogolovka, Russia
b School of Mechanical and Materials Engineering, Washington State University, Pullman, WA
c Institute of Solid State Physics, Russian Academy of Sciences, Chernogolovka, Russia
d Moscow State University, Moscow, Russia

Аннотация: Graphene films were synthesized by the low-pressure no flow CVD on polycrystalline nickel catalyst films grown by the self-ion assisted deposition technique at different biases. Graphene films were transferred to a SiO$_{2}$/Si substrate using PMMA. The graphene grown on Ni films with bimodal grain size distribution and weaker (111) texture had higher thickness uniformity and a lower number of graphene layers. The graphene grown on Ni films with a monomodal grain size distribution and stronger (111) texture had lower thickness uniformity and a higher number of graphene layers. The transport properties of the graphene films were investigated with the aid of Hall measurements.

Ключевые слова: graphene, СVD synthesis, electronic properties.

PACS: 68.65.Pq; 81.05.ue; 73.50.Jt

Язык публикации: английский



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