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ЖУРНАЛЫ // Наносистемы: физика, химия, математика // Архив

Наносистемы: физика, химия, математика, 2015, том 6, выпуск 3, страницы 424–434 (Mi nano956)

PHYSICS

Chemostimulating effect of mixture and separate evaporation of manganese (IV) oxide compositions with lead (II) oxide and vanadium (V) oxide on GaAs thermal oxidation

I. Ya. Mittova, V. F. Kostryukov

Voronezh State University, Universitetskaya pl.1, Voronezh, 394893 Russia

Аннотация: The effects of variable compositions of manganese (IV) oxide – lead (II) oxide and manganese (IV) oxide - vanadium (V) oxide on the GaAs thermal oxidation process have been studied. The spatial separation of the oxides in MnO$_{2}$ + PbO and MnO$_{2}$ + V$_{2}$O$_{5}$ binary compositions activating the thermal oxidation of GaAs has made it possible to locate the interactions between these oxides that are responsible for the non-linear effects observed in their coaction. Solid-phase interactions enhance the chemostimulating activities of both oxides (a positive nonlinear effect takes place). Gas-phase interactions cause a marked negative deviation from the additive chemical stimulation effect.

Ключевые слова: semiconductors, gallium arsenide, thin films, thermal oxidation, nonlinear effects.

PACS: 81.05.Ea

Поступила в редакцию: 13.02.2015
Исправленный вариант: 19.02.2015

Язык публикации: английский

DOI: 10.17586/2220-8054-2015-6-3-424-434



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