R. Hart'anský, J. Hricko, M. Mierka, J. Halgoš, M. Dzuriš, “MEMS Sensor of Force”, Rus. J. Nonlin. Dyn., 2020, том 16, номер 1,страницы 85

Nonlinear physics and mechanics

MEMS Sensor of Force

R. Hart'anský^a, J. Hricko^b, M. Mierka^a, J. Halgoš^a, M. Dzuriš^a

^a Institute of Electrical Engineering, Faculty of Electrical Engineering and Information Technology, Slovak University of Technology, Bratislava, Slovakia
^b Institute of Informatics, Slovak Academy of Sciences Banska Bystrica, Slovakia

Аннотация: The paper is focused on the design of a compact compliant mechanical body (CCMB) that will be used as a transducer of the one-axis force to the distance of two plates. The conversion principle of the distance (which carries information about the acting force) to the frequency of the electrical signal is carefully described in the article too.

Ключевые слова: compact compliant mechanical body, mechanical force sensor, transfer response.

MSC: 93B18, 93B52

Поступила в редакцию: 31.05.2019
Принята в печать: 01.10.2019

Язык публикации: английский

DOI: 10.20537/nd200107